X-ray microdiffraction (XRMD) measurements using the AlN 2201 and 1210 Bragg reflections were performed to determine the cross-sectional distribution of local residuals train and twisting of crystal domains for a thick AlN film grown on a trench-patterned AlN/alpha-Al2O3 template. The distributi on of the strain components in the [0001] and [1120] directions, which are perpendicular to the trench lines, strongly influenced by the presence of voids caused by the trench pattern. The strains in the [1100] and [1120] directions determined using the two Bragg reflections were found to be significantly different, and this was shown to be the result of twisting of the crystal domains about the [0001] axis under the influence of an isotropics hear stress in the prismatic planes. (C) 2013 Elsevier B.V. Allrightsreserved.