화학공학소재연구정보센터
Journal of Crystal Growth, Vol.370, 177-181, 2013
AP-MOVPE GaInSb: Influence of V/III ratio on quality and indium incorporation
The growth of atmospheric pressure metal-organic vapour phase epitaxial (AP-MOVPE) GaSb and Ga1-xInxSb layers with different nominal V/III ratios (1.0-2.0) at 550 degrees C, using trimethylantimony (TMSb), trimethylindium (TMIn) and triethylgallium (TEGa), is being reported. Ga(1-x)ln(x)Sb layers were grown with a constant indium mole fraction in the vapour phase (x(v)) in order to study the dependence of the indium mole fraction in the solid (x) on the V/III ratio. The surface morphology, crystallinity and optical properties of these layers are compared to those of GaSb layers with the aim of understanding their level of sensitivity to changes in the V/III ratio. It has been observed that the indium incorporation into GaSb increases with an increase in the V/III ratio. The shift of the free exciton/band-to-band transition in Ga0.96In0.04Sb with temperature follows the Varshni relation: E(T) = 0.777-7.559 x 10(-4)T(2)/(720+T). (C) 2012 Elsevier B.V. All rights reserved.