화학공학소재연구정보센터
Journal of Crystal Growth, Vol.363, 33-39, 2013
Purification of melt-spun metallurgical grade silicon micro-flakes through a multi-step segregation procedure
Melt-spun metallurgical grade (MG) micron dimension silicon flakes have been purified into near solar grade (SG) quality through a multi-step melting and re-solidification procedure. A wet oxidation-applied thermal oxide maintained the sample morphology during annealing while the interiors were melted and re-solidified. The small thickness of the flakes allowed for near elimination of in-plane grain boundaries, with segregation enhanced accumulation of impurities at the object surface and in the few remaining grain boundaries. A subsequent etch in 48% hydrofluoric acid (HF) removed the impure oxide layer, and part of the contamination at the oxidesilicon interface, as shown by electron dispersive spectroscopy (EDS) and backscattered electron imaging (BEI). The sample grains were investigated by electron back-scattered diffraction (EBSD) after varying numbers of oxidation-annealing-etch cycles, and were observed to grow from similar to 5 mu m to similar to 200 mu m. The concentration of iron, titanium, copper and aluminium were shown by secondary ion mass spectroscopy (SIMS) and inductively coupled plasma mass spectroscopy (ICPMS) to drop between five and six orders of magnitude. The concentration of boron was observed to drop approximately one order of magnitude. A good correlation was observed between impurity removal rates and segregation models, indicating that the purification effect is mainly caused by segregation. Deviations from these models could be explained by the formation of oxides and hydroxides later removed through etching. (C) 2012 Elsevier B.V. All rights reserved.