화학공학소재연구정보센터
Journal of Crystal Growth, Vol.359, 55-59, 2012
Effect of growth temperature on surface morphology and structure of InAs/GaSb superlattices grown by metalorganic chemical vapor deposition
The effect of growth temperature on the surface morphology and crystalline structure of InAs/GaSb type-II superlattices (SLs) grown on (100) GaSb substrates by metalorganic chemical vapor deposition (MOCVD) was investigated by in-situ reflectance measurement, atomic force microscopy, high-resolution x-ray diffraction and Raman scattering spectroscopy. All the data show that the structural properties of the SL samples are very sensitive to the growth temperatures. The optimal SL growth temperature in our MOCVD is 520 degrees C. Only 20 degrees C lower of the temperature resulted in rough surfaces from the beginning of SL epitaxy and 20 degrees C higher resulted in the composition of the mixing interfaces far from expected and consequently deteriorated structure. Room temperature absorption from 2 to 8 mu m has been realized by our samples. (C) 2012 Elsevier B.V. All rights reserved.