We report on the fabrication of silicon nanostructured superhydrophobic and superoleophobic surfaces also called "superomniphobic" surfaces. For this purpose, silicon interfaces with different surface morphologies, single or double scale structuration, were investigated. These structured surfaces were chemically treated with perfluorodecyltrichlorosilane (PFTS), a low surface energy molecule. The morphology of the resulting surfaces was characterized using scanning electron microscopy (SEM). Their wetting properties: static contact angle (CA) and contact angle hysteresis (CAH) were investigated using liquids of various surface tensions. Despite that we found that all the different morphologies display a superhydrophobic character (CA > 150 degrees for water) and superoleophobic behavior (CA approximate to 140 degrees for hexadecane), values of hysteresis are strongly dependent on the liquid surface tension and surface morphology. The best surface described in this study was composed of a dual scale texturation i.e. silicon micropillars covered by silicon nanowires. Indeed, this surface displayed high static contact angles and low hysteresis for all tested liquids. (C) 2013 Elsevier Inc. All rights reserved.