Due to their electronic, spectroscopic and structural property, fullerene has been widely studied. In this paper, we report the fabrication of fullerene film by self-assembled monolayer (SAM). First, the SAM of 11-mercapto-1-undecanol was formed on gold surface and then fullerene derivative molecules with carboxylic functional group were attached to the terminal side of the SAM by esterification reaction. The formation of the SAM and fullerene film was confirmed by contact angle, atomic force microscopy (AFM) topography and X-ray photoelectron spectroscopy (XPS) measurements.