A low flow rate and short diaphragm life are the two disadvantages of diaphragm compressors when applied in hydrogen refueling stations. A new generatrix of the cavity profile of a diaphragm compressor was developed in this study to increase the cavity volume and decrease the diaphragm radial stress. A reduction in the diaphragm radial stress that resulted from the new design was validated by experiment and numerical simulation. The volumes of the cavities with different generatrices and the radial stress distribution of the diaphragm were investigated under various design conditions. The results indicated that the volume of the cavity with the new generatrix was approximately 10% larger than that with a traditional generatrix at the same allowable stress and cavity radius. At a similar cavity volume and radius, the radial stress values of the diaphragm in the cavity with the new generatrix were low. The decrease rate of the maximal radial stress of the diaphragm in the cavity with the new generatrix reached 13.8%. In the diaphragm centric region, where additional stress was induced by discharge holes, the maximal radial stress decrease rate reached 19.6%. Copyright (C) 2014, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.