A cathode-supported micro SOFC was prepared via co-sintering technique of a scandia-stabilized zirconia (ScSZ) electrolyte layer and a micro-tubular (La,Sr)(x)MnO(3-delta) (LSM) support, and subsequent deposition of various anode layers by dip-coating method. The micro-tubular SOFCs were electrochemically evaluated in a humidified H(2) (3% H(2)O) atmosphere. An LSM-Ce(0.9)Gd(0.1)O(1.95) activation layer was also introduced between the cathode tube and the electrolyte layer in order to improve the catalytic activation at the cathode side. The micro SOFCs exhibited a stable open circuit voltage above 1.05 V at 650 degrees C, and the cells with the anode film thicknesses of 8, 30 and 50 mu m generated a maximum power density of 36, 49 and 126 mW/cm(2), respectively. And, the cell with 50 mu m thick anode layer showed about 10 times higher exchange current density than the others, which indicates that the anode performance on the cathode-supported micro SOFC was greatly affected by the thickness of the anode coating layer. Copyright (C) 2011, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.