Recently, there has been a lot of work on the production and investigation of the physical properties of Transparent Conducting Oxide (TCO) materials which have common application area in photovoltaic solar cells and some optoelectronic devices. In this work, CdO film which is a material belongs to TCO family has been produced by Ultrasonic Spray Pyrolysis technique on microscope glass substrates at the substrate temperature of 250 +/- 5 degrees C. Electrical, optical, structural and surface properties of undoped and In doped (at 1.3 and 5%) CdO films and the effect of In doping percentage on the physical properties of CdO films have been investigated. It has been determined that electrical conductivity of CdO film is high and this value has been decreased by in doping. After the optical investigations, it has been observed that the transmittances of the films are about 30% and decreased dramatically by in doping. XRD investigations showed that, films have polycrystalline structure and good crystallinity levels. It has been found that in element hasn't got an important effect on the morphology of the films after the examination of surface micrographs. It has been determined that Cd and O elements are present in the solid film by using EDS. After all investigations, it has been concluded that In doping has an important effect on the electrical, optical, structural and surface properties of CdO films. (C) 2008 International Association for Hydrogen Energy. Published by Elsevier Ltd. All rights reserved.