Ignition delay times of tetraethoxysilane (TEOS), hexamethyldisiloxane (HMDSO) and titanium tetraiso-propoxide (TTIP) were determined from the onset of chemiluminescence in shock-tube experiments behind reflected shock waves in dry as well as in humid gas mixtures. Additionally, the ignition delay times of TEOS and HMDSO have been investigated in humid air and as a function of water vapor concentration in the initial gas mixture. (C) 2014 Elsevier B.V. All rights reserved.