Quartet excited halogen atoms F*(2p(4) 3s, P-4(J)), Cl*(3p(4) 4S, P-4(J)), Br*(4p(4) 5s, P-4(J)), and I*(5p(4) 6s, P-4(J)), where the J’s are 5/2, 3/2 and 1/2, were found to be produced in the electron pulse irradiation of Ne or Ar containing one of SF6, CCl4, CClF3, CBrF3, CBr2F2, and CF3I. The population distribution ratios at the stage of production were 1.0(J = 5/2):0.41(J = 3/2):0.06(J = 1/2) for F* in Ne containing SF6, 1.0(J = 5/2):0.27(J = 3/2):0.14(J = 1/2) for Cl* in Ne containing CCl4, 1.0(J = 5/2):0.29(J = 3/2):0.2- 0.3(J = 1/2) for Br* in Ne containing CBr2F2, and 1.0(J = 5/2):0.13(J = 3/2):0.54(J = 1/2) for I* in Ar containing CF3I. The observed ratios considerably differ from those calculated from the Boltzmann distribution law. F*(P-4(5/2)), F*(P-4(3/2)), and Cl*(P-4(5/2)) are mainly produced by the reactions of lowest triplet excited diatomic molecules of neon with SF6 and CCl4. Cl*(P-4(3/2) and CI*((4)P1/2) are produced in a rapid process and deactivated into lower Cl*(P-4(5/2)). Several reaction channels probably contribute to the formation of Br*(P-4(J)) and I*(P-4(J)). Rate constants for reactions of triplet excited diatomic molecules of neon or argon with these parent molecules were determined from observed absorption decay curves for Ne-2* or Ar-2* in the presence of parent molecules.