Currently no measurement technique is able to provide continuous monitoring of humidity for a wide range of polar solvents. Therefore a feasibility study on humidity measurements in vaporized hydrocarbons using tunable diode laser absorption spectroscopy (TDLAS) is done. In systematic measurements polar and unpolar solvents were vaporized into a hot nitrogen flow and subsequently analyzed in a TDLAS monitor. The experiments show reproducible results for humidity measurements in unpolar liquids like n-hexane, but several problems are occurring in polar primary alcohols.