화학공학소재연구정보센터
Applied Surface Science, Vol.306, 70-74, 2014
Mastering the biaxial stress state in nanometric thin films on flexible substrates
Biaxial stress state of thin films deposited on flexible substrate can be mastered thanks to a new biaxial device. This tensile machine allows applying in-plane loads F-x and F-y in the two principal directions x and y of a cruciform-shaped polymer substrate. The transmission of the deformation at film/substrate interface allows controlling the stress and strain field in the thin films. We show in this paper a few illustrations dealing with strain measurements in polycrystalline thin films deposited on flexible substrate. The potentialities of the biaxial device located at Soleil synchrotron are also discussed. (C) 2014 Elsevier B.V. All rights reserved.