A finite element modeling (FEM) model is developed to simulate the effects of overlapping rate, laser spot diameter and laser power density on residual stress of Ti-6A1-4V alloy at the surface and in the depth direction using ABQUAS software, and a simulated residual stress field is analyzed and compared with the experimental data. Results showed the fluctuation ratio of surface residual stress decreases gradually with increasing overlapping rate. The increment of laser power density can increase the affected depth of residual stress, and the higher value of surface residual stress can be obtained by increasing laser spot diameter when laser power density remains unchanged. In addition, the influence mechanism of overlapping LSP impacts on Ti-6A1-4V alloy is clearly also investigated. (C) 2013 Elsevier B.V. All rights reserved.