A finite element simulation of nitriding is proposed in this paper, using the analogy between diffusion and heat conduction, to overcome the shortcomings of the classical internal oxidation model in predicting the kinetics of layer growth and nitrogen distribution during nitriding. To verify the model, a typical gas nitriding has been carried out on an axisymmetric specimen. Treated specimen has been characterized using optical microscopy (OM), scanning electron microscopy (SEM), micro-hardness and X-Ray diffraction (XRD) measurements. It was found that the so-called diffusion zone can be divided into two parts with different influence on the mechanical characteristics including residual stress and hardening. First layer which is a two phase region of ferritic matrix and gamma' (Fe4N) makes further improvement with respect to the second layer which is a solid solution of nitrogen in ferrite. The formation of that two phase region, which is not predicted by classical model, can be efficiently recognized by the proposed model. It is also proved that the model has the ability to consider the geometry dependency of layer growth and formation in nitriding. (C) 2013 Elsevier B.V. All rights reserved.