Multilayer structure of thin films by the sol-gel process attracts great attention for versatile applications. However, the multilayer structure often shows undesirable morphologies such as cracks or delaminations resulted from non-wettability of the coating solution with the pre-deposited hydrophobic layer, especially in the case of SiO2 layers. The hydrophobic surface is originated from residual alkoxy groups in the layer after sintering step. For the sintering process, introducing the heating-up period from the room temperature to the target temperature is very effective in removing residual alkoxy groups from the SiO2 film by hydrolysis with remaining water molecules. The well-defined TiO2/SiO2 multilayer structure is successfully fabricated at a sintering temperature of 300 degrees C by forming a hydrophilic SiO2 layer with the heating-up period. (C) 2012 Elsevier B.V. All rights reserved.