화학공학소재연구정보센터
Applied Surface Science, Vol.261, 101-109, 2012
Effect of ambient environment on excimer laser induced micro and nano-structuring of stainless steel
The effect of laser fluence and an ambient environment on the formation and development of the micro and nano-structures on the laser irradiated stainless steel (AISI-304) targets have been investigated. For this purpose KrF excimer laser (lambda = 248 nm, t = 20 ns, repetition rate 20 Hz) has been used. The targets are exposed for various laser fluences ranging from 0.72 J cm(-2) to 1.27 J cm(-2) under the vacuum condition and in the oxygen environment at a pressure of 133 mbar. Various features of treated targets, such as surface morphology, chemical composition and crystalline structure are analyzed by scanning electron microscope, energy dispersive X-ray spectroscopy and X-ray diffraction techniques, respectively. Scanning electron microscope analysis reveals the formation of laser-induced periodic surface structures (LIPSS), cavities, hillocks in both ambient environments (vacuum, oxygen). Cone-formation on the top of wave like ridges is observed under vacuum condition. In case of oxygen only redeposition is observed. Energy dispersive X-ray spectroscopy analysis exhibits that there is variation in chemical composition in both environments. When the target is treated in oxygen environment enhancement of the surface oxygen content is observed. X-ray diffraction exhibits that no new phases are formed under vacuum condition but a phase change in oxygen ambient is observed. For various fluences the variation in the peak intensity, crystallinity and d-spacing is observed under both ambient conditions. (C) 2012 Elsevier B.V. All rights reserved.