Low temperature co-fired ceramic (LTCC) technology is successfully employed for the first time to develop a vaporizing liquid propellant microthruster (VLM). The VLM has potential applications as micro-propulsion system for attitude control of microsatellites. The design, fabrication and testing of the LTCC based VLM are presented. Preliminary testing is done by using water as liquid propellant. The VLM of nozzle throat size 220 mu m x 200 mu m produces an average thrust in the range of 34-68 mu N for a flow rate of 1 mg s(-1) with an input heater power varying from 7.1-9.2 W. An average specific impulse of 3.4-6.9 s is measured. An average impulse bit of 0.67-1.4 mNs, 3.40-6.70 mNs is measured for thruster firing time of 20 s and 100 s during VLM stable mode operation at sea level conditions. (C) 2011 Elsevier Ltd. All rights reserved.