The synthesis of 1,3-dichloro-cyclo-1,3-diphosphadiazanes [ClP(mu-NR)](2) via elimination of Me3SiCl from silylated amino(dichloro)phosphanes, R-N(SiMe3)PCl2, was studied by different synthetic protocols starting from R-N(H)SiMe3 (R = Si(SiMe3)(3) = Hyp, N(SiMe3)(2), Mes* = 2,4,6-tri-tert-butylphenyl, Ter = 2,4-bis(2,4,6-trimethylphenyl)phenyl, Dipp = 2,6-diisopro-pylphenyl, Dmp = 2,6-dimethylphenyl, Ad = Adamantyl, Trityl = Ph3C, Tos = tosyl = CH3C6H4SO2, n-Oct = n-octyl, and Me3Si).A new synthetic route using trimethylsilyl-substituted amino(dichloro)phosphanes, R-N(SiMe3)PCl2, was developed to form cyclo-diphosph(III)-azanes simply by adding a mixture of RfOH/base (RfOH = hexafluoroisopropanole). By this method electron-rich/-poor aryl-, silyl-, and bissilylamino-substituted cyclo-diphosph(III)-azanes are accessible such as the unprecedented (Me3Si)(2)N-substituted species [ClP(mu-NN(SiMe3)(2))](2) starting from tris(trimethylsilyl)hydrazine and PCl3. Additionally, the difficulties with the preparation of cyclo-diphosphadiazanes depending on the starting materials, solvents, and bases due to the competition of different reaction channels are studied.