In recent years, atmospheric plasma sources have been developed for industrial applications, because of its no need of vacuum pumping system or chambers and high-density plasma can be generated. However, conventional atmospheric plasma sources have a limitation of usable plasma gas species and a problem of thermal or electric discharge damage to targets. In our group, damage-free multi-gas plasma jet that solves these problems was developed. In this study, surface hydrophilization was tested using various kinds of plasma gases and effectiveness was investigated. Polyimide film was treated by oxygen, nitrogen and argon plasma in atmosphere. Nitrogen plasma was most effective and oxygen and argon plasmas follow it in order. Treated polyimide film surface by oxygen or nitrogen plasma was analyzed by XPS. It is observed that the percentage of C-C was decreased to 50% and C=O was increased to 40% with no difference between gas species. In plasma gas closed condition, nitrogen and oxygen plasma were most effective. Nitrogen and argon plasma had less hydrophilic effect in closed condition than that of in atmospheric condition.