실리콘 알콕사이드의 합성기술과 응용

노재성; 양현수; 조헌영; 조태웅

Journal of the Korean Industrial and Engineering Chemistry, Vol.4, No.2, 240-253, June, 1993

Export Citation

실리콘 알콕사이드의 합성기술과 응용

Preparation and Application of Silicon alkoxide

노재성, 양현수, 조헌영, 조태웅

초록

실리콘알콕사이드는 실리카섬유와 박막재료 및 각종 세라믹스의 합성원료로써 필수적인 물질이 되었으며, 최근에는 16MD램 이상의 초고도 전자제품의 VLSI용 박막 원료로 각광을 받게 되면서 그 중요성이 더한층 강조되고 있다. 따라서 본 본문에서는 실리콘알콕사이드의 각종 합성방법과 반응기구 및 응용분야 등을 요약 정리하고, 실리콘알콕사이드 합성에 관한 본 연구팀의 연구결과 및 문제점을 간략하게 소개하였다.

Silicon alkoxides are used as a raw materials of silica fibers, coating films and fine ceramics. Specially, the alkoxides have been confirmed the best raw material for VLSI thin film of computors in recent years. Because, the impotance of silicon alkoxides are increasing more and more now a days. And so, in thls report the synthetic methods, reaction mechanism, application fields of silicon alkoxides are summerized. Also, the results of our research and technical problems of silicon alkoxide preparation are introduced briefly.

[References]

Bradley DC, AbdelHalim FM, Wardlaw W, J. Chem. Soc., 3450 (1950)
Dearing AW, EmmetReid E, J. Am. Chem. Soc., 50, 3058 (1928)
Bradely DC, Mehrotra RC, Wardlaw W, J. Chem. Soc., 4204 (1952)
Bradely DC, Mehrotra RC, Wardlaw W, J. Chem. Soc., 5020 (1952)
Bradley DC, Saad MA, Wardsaw W, J. Chem. Soc., 2002 (1954)
Bradley DC, "Metal Alkoxides," Progress in Inorganic Chemistry, Interscience Publishers, division of John Wiley & Sons, Inc. Vol. 2, 303 (1960)
Bradley DC, Accounts Chem. Res., 9, 273 (1976)
Mehrotra RC, J. Ind. Chem. Soc., 32, 759 (1955)
Mehrotra RC, J. Am. Ceram. Soc., 76, 2266 (1954)
Mehrotra RC, Inorg. Chem. Acta Rev., 99 (1967)
Mehrotra RC, Mahendra KN, Aggrawal M, Proc. Ind. Acad. Sci., 93, 719 (1984)
Mehrotra RC, J. Non-Cryst. Solids, 100, 1 (1988)
Yoldas BE, J. Mater. Sci., 12, 1203 (1977)
Turner CW, Ceram. Bull., 70, 1487 (1991)
Dislich H, Angew. Chem.-Int. Edit., 10, 363 (1971)
Mazdiyasni KS, Ceram. Int., 8, 42 (1982)
Mackenzie JD, J. Non-Cryst. Solids, 100, 162 (1988)
Guglielmi M, Scarinci G, Maliavsky N, Ceram. Int., 14, 153 (1988)
Radonjic L, Nikolic L, Ceram. Int., 13, 145 (1987)
Okubo T, Watanabe M, Kusakabe K, Morooka S, 化學工學, 53, 755 (1989)
Okamura H, Bowen HK, Ceram. Int., 12, 161 (1986)
Wright JR, Bolt RO, Goldschmidt A, Abbott AD, J. Am. Chem. Soc., 80, 1733 (1958)
Speer RJ, J. Org. Chem., 14, 655 (1949)
Tamborski C, Post HW, J. Org. Chem., 17, 1400 (1952)
Hyde JF, Curry JW, J. Am. Ceram. Soc., 77, 3140 (1955)
Ennan AA, Kats BM, Chem. Abstr., 75, 109775 (1971)
Jennings JS, Wardlaw W, Way WJR, J. Chem. Soc., 637 (1936)
Breederveld H, Wateraman HI, Rec. Trav. Chim., 73, 871 (1954)
George PD, Newkirk AE, J. Org. Chem., 25, 1645 (1960)
Guglielmi M, Carturan G, J. Non-Cryst. Solids, 100, 16 (1988)
Peooard DF, Brown WG, Johnson WC, J. Am. Chem. Soc., 68, 73 (1946)
Ridge D, Todd M, J. Chem. Soc., 2637 (1949)
Sanchez C, Livage J, Henry M, Babonneau F, J. Non-Cryst. Solids, 100, 65 (1988)
Sumio S, Am. Ceram. Soc. Bull., 61, 11 (1985)
Post HW, Hofrichter CH, J. Org. Chem., 572 (1940)
Sugden S, Wilkins H, J. Chem. Soc., 126 (1930)
Augat F, Sufraga F, Ger. Offen. Patent, 2033 373 (1971)
Augat F, Sufraga F, Chem. Abstr., 74, 12583 (1971)

[Referenced By]

[1] Bradley DC, AbdelHalim FM, Wardlaw W, J. Chem. Soc., 3450 (1950)

[2] Dearing AW, EmmetReid E, J. Am. Chem. Soc., 50, 3058 (1928)

[3] Bradely DC, Mehrotra RC, Wardlaw W, J. Chem. Soc., 4204 (1952)

[4] Bradely DC, Mehrotra RC, Wardlaw W, J. Chem. Soc., 5020 (1952)

[5] Bradley DC, Saad MA, Wardsaw W, J. Chem. Soc., 2002 (1954)

[6] Bradley DC, "Metal Alkoxides," Progress in Inorganic Chemistry, Interscience Publishers, division of John Wiley & Sons, Inc. Vol. 2, 303 (1960)

[7] Bradley DC, Accounts Chem. Res., 9, 273 (1976)

[8] Mehrotra RC, J. Ind. Chem. Soc., 32, 759 (1955)

[9] Mehrotra RC, J. Am. Ceram. Soc., 76, 2266 (1954)

[10] Mehrotra RC, Inorg. Chem. Acta Rev., 99 (1967)

[11] Mehrotra RC, Mahendra KN, Aggrawal M, Proc. Ind. Acad. Sci., 93, 719 (1984)

[12] Mehrotra RC, J. Non-Cryst. Solids, 100, 1 (1988)

[13] Yoldas BE, J. Mater. Sci., 12, 1203 (1977)

[14] Turner CW, Ceram. Bull., 70, 1487 (1991)

[15] Dislich H, Angew. Chem.-Int. Edit., 10, 363 (1971)

[16] Mazdiyasni KS, Ceram. Int., 8, 42 (1982)

[17] Mackenzie JD, J. Non-Cryst. Solids, 100, 162 (1988)

[18] Guglielmi M, Scarinci G, Maliavsky N, Ceram. Int., 14, 153 (1988)

[19] Radonjic L, Nikolic L, Ceram. Int., 13, 145 (1987)

[20] Okubo T, Watanabe M, Kusakabe K, Morooka S, 化學工學, 53, 755 (1989)

[21] Okamura H, Bowen HK, Ceram. Int., 12, 161 (1986)

[22] Wright JR, Bolt RO, Goldschmidt A, Abbott AD, J. Am. Chem. Soc., 80, 1733 (1958)

[23] Speer RJ, J. Org. Chem., 14, 655 (1949)

[24] Tamborski C, Post HW, J. Org. Chem., 17, 1400 (1952)

[25] Hyde JF, Curry JW, J. Am. Ceram. Soc., 77, 3140 (1955)

[26] Ennan AA, Kats BM, Chem. Abstr., 75, 109775 (1971)

[27] Jennings JS, Wardlaw W, Way WJR, J. Chem. Soc., 637 (1936)

[28] Breederveld H, Wateraman HI, Rec. Trav. Chim., 73, 871 (1954)

[29] George PD, Newkirk AE, J. Org. Chem., 25, 1645 (1960)

[30] Guglielmi M, Carturan G, J. Non-Cryst. Solids, 100, 16 (1988)

[31] Peooard DF, Brown WG, Johnson WC, J. Am. Chem. Soc., 68, 73 (1946)

[32] Ridge D, Todd M, J. Chem. Soc., 2637 (1949)

[33] Sanchez C, Livage J, Henry M, Babonneau F, J. Non-Cryst. Solids, 100, 65 (1988)

[34] Sumio S, Am. Ceram. Soc. Bull., 61, 11 (1985)

[35] Post HW, Hofrichter CH, J. Org. Chem., 572 (1940)

[36] Sugden S, Wilkins H, J. Chem. Soc., 126 (1930)

[37] Augat F, Sufraga F, Ger. Offen. Patent, 2033 373 (1971)

[38] Augat F, Sufraga F, Chem. Abstr., 74, 12583 (1971)