Contact angle and temperature-dependent variable angle spectroscopic ellipsometry measurements have been performed on plasma-deposited linalyl acetate thin films in order to provide insight into the compatibility of the material with current organic electronic fabrication techniques. XPS data on several substrates confirmed that the chemical properties of the thin films were substrate independent. The plasma-deposited layers were found to be insoluble in many solvents commonly used in the deposition of organic semiconducting layers, including chloroform and dichlorobenzene, and the wetting envelope for the surfaces presented. Thermal degradation was found to begin at similar to 200 A degrees C, and up until this temperature the material's thickness, refractive index and transparency in the visible region were constant. The exhibited properties show plasma-deposited linalyl acetate thin films to be compatible with state of the art organic electronic processing techniques.