The present work aims to address the characteristics of steady state deformation, which determines the limit of grain refinement for a given material by severe plastic deformation. The focus is on low temperatures at which most deformation processing is conducted. Submicron grained Al-0.1 Mg alloy prepared by equal channel angular pressing was deformed by plane strain compression in a channel-die and rolling at a constant strain rate of 10(-2) s(-1) and at a range of temperatures from 77 to 473 K to various strains. Microstructures were characterized by electron backscatter imaging and EBSD in a FEGSEM. Grain refinement to the ECAP submicron structure occurred during deformation at cryogenic temperatures of 77-213 K, whereas coarsening took place during deformation at elevated temperatures. A steady state deformation was observed at all temperatures where a constant grain structure was developed and maintained upon further straining. The microstructural characteristics of steady state deformation and mechanism responsible for the establishment of the steady state are discussed.