Ultrafine-grained and even nanostructured materials can be fabricated using severe plastic deformation to ultra-high strains in equal-channel angular pressing (ECAP), high-pressure torsion (HPT), machining and their combinations, such as machining of ECAP specimens, HPT of ECAP billets and HPT of machining chips. This report presents recent results of investigations of the microstructures and microtextures of pure copper, nickel and aluminium subjected to different deformation processes to ultimately high imposed strains. A comparison of the microstructure, dislocation density and microhardness developed during combinations of different strain paths is performed. All characteristics were analysed by X-ray, transmission and scanning electron microscopy, and electron backscatter diffraction (EBSD). The influence of different processing routes is discussed in terms of the accumulated strain and microstructure refinement. The saturation in grain refinement is examined with reference to the recovery taking place during ultra-high strain deformation. A phenomenological model based on the Voce equation is applied for fitting parameters based on the experimental data and this is suggested for a prediction of microhardness evolution for pure metals (Ag, Au) and Cu-based (Zn, Al) alloys.