A new combination of techniques named evaporation-induced self-assembly-plasma etching (EISA-PE) method for mesoporous titania thin films preparation has been developed. The main advantage of this method is that the organic templates can be removed by plasma etching method thus the inorganic frameworks shrinkage or collapse induced by calcination can be avoided. Titania films prepared by this method have been characterized by Fourier transform infrared spectroscopy, thermogravimetric analyses, small and wide-angle X-ray diffraction, and field emission scanning electron microscope. The results show that titania thin film with well-resolved mesostructure can be created by EISA-PE method. The results also prove that plasma parameters have a great influence on the mesoporous property of the film and it is a good kind of catalyst support for methanol catalytic combustion.