화학공학소재연구정보센터
Materials Research Bulletin, Vol.47, No.11, 3681-3690, 2012
Thin film deposition of diamond using normal paraffins as source of diamond nucleation centers
We propose a process for diamond thin film pro deposition using normal paraffins (nP) as source of diamond nucleation centers. We deposited micro-crystalline diamond thin films (MCDTF) on a Cu substrate using Hot Filament CVD (HFCVD) and Passive Pt/Pd Surface Catalysis (PPt/PdSC) methods. Beeswax and a 1:1 mixture of normal paraffins of the general formula CH3(CH2)(n)CH3 with n = 22 and 26 were tested as nP starting material. The films obtained were characterized by scanning electronic microscopy (SEM), Raman scattering temperature dependent spectroscopy and X-ray diffraction (XRD) methods, all of which confirmed that the deposited material is MCDTF. (C) 2012 Elsevier Ltd. All rights reserved.