ZnO thin films were deposited on graphite substrates by ultrasonic spray pyrolysis method. The effects of substrate temperature and film thickness on the crystalline structure, morphology, and optical properties of the as-grown ZnO films were investigated systemically. Results illustrated that dense ZnO films with hexagonal wurtzite structure were uniformly distributed on the substrate. Strong near-band edge ultraviolet (UV) emission peaks were observed in room temperature photoluminescence (PL) spectra for the samples prepared under optimized parameters, yet the usually observed defect related deep level emissions were nearly undetectable, indicating high optical quality ZnO films could be achieved via this easy process under optimal conditions. The successful growth of polycrystalline ZnO films on graphite offers the significant opportunity to be readily transferred onto any rigid or flexible foreign substrates, since the graphite substrates consist of weakly bonded layer structure. (c) 2012 Elsevier Ltd. All rights reserved.