Thin Solid Films, Vol.520, No.7, 2938-2942, 2012
Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: cor-In-2 (-) (2x) ZnxSnxO3
Thin films of corundum-type In2-2xZnxSnxO3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Phi-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide. (C) 2011 Elsevier B.V. All rights reserved.
Keywords:Transparent conducting oxide;Pulsed-laser deposition;Epitaxial;Zinc indium tin oxide;Lattice matched;Corundum