The electrical dark conduction properties of surface cells of copper (II) phthalocyanine (CuPc) thin films of various thicknesses have been studied as a function of voltage at different sample temperatures by using a specially designed conductivity chamber. The results have been analyzed on the basis of the space charge limited conduction theory. The trap distribution in the film surface has been found to be exponential type. Action spectra for the surface photoconductivity in CuPc films for various thicknesses have been performed at room temperature (303 K). The dependence of surface photoconductivity was studied as a function of intensity of the photoexciting light at different sample cell temperatures. The distribution of traps in this thin film surface has been determined from the intensity dependence of surface photocurrent and the results have been compared with the results of dark conductivity measurement. (C) 2011 Elsevier B.V. All rights reserved.