CdS/CdTe thin film solar cells with an area of 1 cm(2) were obtained and studied in detail. A ZnO buffer layer was deposited by reactive RF-sputtering on commercial ITO substrates. The CdS layer was grown on ZnO also by using RF-sputtering and CdTe thin film was deposited by conventional CSS technique. The chlorination of the solar cells is performed into Freon atmosphere at 400 degrees C. The CdTe thin film surface was chemically etched by using Br-Methanol solution. The back contact was deposited using RF-sputtering from a pure Cu and Mo targets. The procedure developed in this work led us to make systematically solar cells with good efficiency. However, the series resistance has a high value for an area of 1 cm(2) (22 Omega cm(2)). In order to make more detailed study, the solar cell with an area of 1 cm(2) was divided in a 3x3 matrix. A good homogeneity in cell properties is observed and the efficiency increases to more than 11%, fundamentally through decreasing series resistance. (C) 2011 Elsevier B.V. All rights reserved.