The modifications of direct transition energies by lattice deformations were investigated in beta-FeSi2 epitaxial films, polycrystal films and single crystal, systematically. The lattice deformations depending on thermal annealing temperature (T-a) were observed in beta-FeSi2 epitaxial films. In photoreflectance (PR) measurements, the direct transition energies of the epitaxial films shifted to lower energies as the Ta increased. The polycrystal films did not show the lattice deformation and the shift of direct transition energies. These results show that the direct bandgap is modified by the lattice deformation originating from the lattice mismatch at the hetero-interface of beta-FeSi2/Si. (C) 2011 Elsevier B. V. All rights reserved.