화학공학소재연구정보센터
Thin Solid Films, Vol.519, No.14, 4589-4593, 2011
Synthesis of carbon nanowalls by hot-wire chemical vapor deposition
Carbon nanowall (CNW) is a carbon nano-material which has a wall structure that stood on substrates. CNWs can be synthesized by hot-wire chemical vapor deposition (HWCVD) using methane without hydrogen dilution. The synthesis of CNWs by HWCVD is discussed along with reviewing the experimental results. The growth of CNWs is affected by hydrogen dilution ratio and substrate surface temperature. Based on these results, it is suggested that hydrogen radical density and substrate surface temperature are the important parameters for the synthesis of CNWs. The growth process of CNWs is also discussed. (C) 2011 Elsevier B.V. All rights reserved.