Investigation of the tribological behavior and its relationship to the microstructure and mechanical properties of a-SiC:H films elaborated by low frequency plasma assisted chemical vapor deposition

Soum-Glaude A; Rambaud G; Grillo SE; Thomas L

Thin Solid Films, Vol.519, No.4, 1266-1271, 2010

DOI10.1016/j.tsf.2010.09.024 Export Citation

Investigation of the tribological behavior and its relationship to the microstructure and mechanical properties of a-SiC:H films elaborated by low frequency plasma assisted chemical vapor deposition

Soum-Glaude A, Rambaud G, Grillo SE, Thomas L

Amorphous hydrogenated silicon carbide (a-SiC:H) coatings are promising candidates for tribological applications in the mechanical and aeronautical industries. Alternately high values of hardness H (15

Keywords:Plasma assisted chemical vapor deposition;a-SiC:H;Hard coatings;Mechanical characterization;Tribology;X-ray photoelectron spectroscopy;Wear