Nano-arrays of bio-molecules have potential applications in many areas namely, bio-sensors, bio/molecular electronics and virus detection. Spot array, micro-contact printing and photolithography are used for micron size array fabrications while Dip-Pen Nanowriting (DPN) is employed for submicron/nano size arrays. We have fabricated nano-dots of 16-MHA (16-mercaptohexadecanoic acid) self-assembled monolayer (SAM) on gold substrate by DPN technique with different dwell time under varying relative humidity. These patterns were imaged in the same system in LFM (Lateral Force Microscopy) mode with fast scanning speed (5 Hz). The effect of humidity on size variation of nano-dots has been studied. During experiments, relative humidity (RH) was varied from 20% to 60%, while the temperature was kept constant similar to 25 degrees C. The minimum measured diameter of the dot is similar to 294 nm at RH = 20% for a dwell time of 2 s. The thickness of the 16-MHA dots, estimated in NanoRule image analysis software is similar to 2 nm, which agrees well with the length of single MHA molecule (2.2 nm). The line profile has been used to estimate the size and thickness of dots. The obtained results will be useful in further development of nano-array based bio-sensors and bio-electronic devices. (C) 2010 Elsevier B.V. All rights reserved.