Thin films of gadolinium oxide, gadolinium yttrium oxide, and gadolinium cerium oxide were electrodeposited from non-aqueous baths. The films were on the order of 15 nm thick, and were grown epitaxially on textured nickel-tungsten substrates. The effect of deposition rate, annealing temperature and secondary metals on crystallinity and crystal orientation was investigated by X-ray diffraction and transmission electron microscopy. Slower rates, higher temperatures and low concentrations of yttrium improve the crystallinity of gadolinium oxide films, whereas the introduction of cerium induced polycrystallinity. (C) 2010 Published by Elsevier B.V.