Magneli phases of Ti27O52 and Ti6O11 films were prepared by laser chemical vapor deposition using Ti(dpm)(2) (O-i-Pr)(2) as a precursor. Ti6O11 film was obtained at a laser power (P-L) of 200 W and a deposition temperature (T-dep) of 1270 K. Ti27O52 film was obtained at P-L = 150 to 200 W and T-dep = 1120 to 1250 K. Ti6O11 and Ti27O52 films had a faceted texture about 2 mu m in grain size and a columnar cross section. The deposition rate of Ti27O52 and Ti6O11 films were 90 and 70 mu m h(-1), respectively. (C) 2010 Elsevier B.V. All rights reserved.