Here we demonstrate facile synthesis method for formation of highly ordered mesoporous cubic lm-3 m titania thin film. The mesostructural ordering is strongly dependent on the aging condition after the spin-coating. The aging condition under low temperature and low humidity is found as an optimum condition for achieving highly ordered mesostructure in titania thin films. The effects of other important synthetic parameters. such as pH of the precursor solutions and aging periods, on the mesostructural ordering are carefully examined. After the calcination, continuous mesoporous films with partially crystallized frameworks are formed without any cracks. The mesostructure of the calcined films is formed by thermal shrinkage of the original lm-3 m mesostructure. The mesostructural change in the films calcined at various temperatures are studied by using the grazing-incidence small-angle X-ray scattering (GI-SAXS). The GI-SAXS patterns show the strong shrinkage along the perpendicular direction to the substrate by increasing the calcination temperature. (C) 2010 Elsevier B.V All rights reserved