Thin Solid Films, Vol.518, No.21, 5978-5980, 2010
Fully dense, non-faceted 111-textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias
Keywords:Pulsed magnetron sputtering;High power impulse magnetron sputtering (HiPIMS);High power pulsed magnetron sputtering (HPPMS);Titanium nitride;Transmission electron microscopy;Thin films;Nucleation and growth;Ion-assisted deposition