Y2O3:Eu3+ red-emitting thin film phosphor was prepared by a two-step process: the cathodical deposition of thin film of yttrium hydroxide and europium hydroxide followed by an annealing process to achieve Eu3+ doped Y2O3 film. It is found that the atomic content of Eu3+ can be well controlled by simply adjusting the volume ratio of Y(NO3)(3) to Eu(NO3)(3) solutions. Dependence of the photoluminescence intensity on the atomic content of Eu3+ in Y2O3 was also studied. The best photoluminescence performance of Y2O3:Eu3+ thin film phosphor was achieved as atomic content of Eu3+ equal to 1.85 at.%. (C) 2010 Elsevier B.V. All rights reserved.