This work reports on the low temperature preparation and characterization of BaZrO3 (BZO) epitaxial thin films by chemical solution deposition (CSD). The X-ray theta-2 theta scan and p-scan measurements have demonstrated that the BZO films exhibit cube-on-cube epitaxy on (100) MgO substrates, with the full width at half maximum (FWHM) for the omega-scan and phi-scan of 0.35 degrees and 0.46 degrees, respectively. The SEM and AFM analyses revealed that the morphology of the films is strongly correlated with annealing temperature. The root mean square roughness for the film annealed at 600 degrees C is 3.63 nm, while for the film grown at 1000 degrees C is 5.25 nm. (C) 2009 Elsevier B.V. All rights reserved.