The growth of AlN nano-columns by ammonium nitridation of Al nano-squares embedded in SiO(2) on Si(111) substrates was studied by high-resolution X-ray photoemission spectroscopy from a synchrotron radiation source and scanning electron microscopy (SEM). Selective nitridation of the Al nano-squares on the SiO(2) mask was obtained in the temperature window of 600 degrees C-700 degrees C. The well-shaped AlN nano-column arrays with diameters confined by the lateral size of the Al nano-squares (similar to 100 nm) were observed in SEM. (C) 2009 Elsevier B.V. All rights reserved.