Polycrystalline thin films of cadmium stannate (Cd(2)SnO(4)) were deposited by spray pyrolysis method on the Corning substrates at substrate temperature of 525 degrees C. Further, the films were annealed at 600 degrees C in vacuum for 30 min. These films Were characterized for their structural, electrical and optical properties. The experimental results showed that the post-deposition annealing in vacuum has a significant influence on the properties of the films. The average grain size of the film was increased from 27.3 to 35.0 nm on heat treatment. The average optical transmittance in the visible region (500-850 nm) is decreased from 81.4% to 73.4% after annealing in vacuum. The minimum resistivity achieved in the present study for the vacuum annealed films is the lowest among the reported values for the Cd2SnO4 thin films prepared by spray pyrolysis method. (C) 2009 Elsevier B.V. All rights reserved.