화학공학소재연구정보센터
Thin Solid Films, Vol.518, No.1, 392-395, 2009
Microstructure, domain structures and ferroelectric properties in (Pb-0.8,La-0.1,Ca-0.1)TiO3/Pb(Zr-0.2,Ti-0.8)O-3 bilayered thin film
Ferroelectric (Pb-0.8,La-0.1,Ca-0.1)TiO3/Pb(Zr-0.2,Ti-0.8)O-3 (PLCT/PZT) bilayered thin film was prepared on Pt(111)/Ti/SiO2/Si(100) substrate by RF magnetron sputtering technique. Pure perovskite crystalline phase, determined by X-ray diffraction, was formed in the PLCT/PZT bilayer. The bilayered film exhibited a very dense and smooth surface morphology with a uniform grain size distribution. The ferroelectric domain structures were investigated by a combination of vertical and lateral piezoresponse force microscopy (VPFM and LPFM. respectively). It is demonstrated by both VPFM and LPFM observations that out-of-plane and in-plane lamellar ferroelectric domains coexist in the bilayered thin film. The PLCT/PZT bilayered film possesses good ferroelectric properties with relatively high spontaneous polarization (2P(s), = 82 mu C/cm(2)) and remnant polarization (2P(s), = 26.2 mu C/cm(2)). (C) 2009 Elsevier B.V. All rights reserved.