The different thickness (5-40 nm) FePt films with Fe and Pt monatomic layer were alternate deposited on a Corning 7059 glass substrate without under-layer, and annealed these films at different temperatures (500700 degrees C). X-ray diffraction analysis of the 10 nm FePt sample which annealed at 700 degrees C for 30 min, the (001) and (002) diffraction peaks are stronger than those annealed at 600 degrees C for 30 and 60 min. And the out-of-plane coercivity (Hc(perpendicular to)) and out-of-plane squareness (S-L) value of this film are about 20 kOe and 1, respectively. Field emission gun high resolution transmission electron microscopy (FEG-TEM) analysis of 10 nm FePt annealed at 700 degrees C for 30 min, show that that the distribution of FePt grains is very uniform and the grain sizes are smaller than 12 turn. (C) 2009 Elsevier B.V. All rights reserved.