Diamond-Like Cat-boil (DLC) films find abundant applications as hard and protective coatings clue to their excellent mechanical and tribological performances. The addition of new elements to the amorphous DLC matrix tunes the properties of this material, leading to all extension of its scope of applications. In order to scale tip their production to a large plasma reactor, DLC films modified by silicon and oxygen additions have been grown in an industrial plant of 1 m(3) by means of pulsed-DC plasma-activated chemical vapour deposition (PACVD). The use of all additional microwave (MW) source has intensified the glow discharge, partly by electron cyclotron resonance (ECR), accelerating therefore the deposition process. Hence, acetylene, tetramethylsilane (TMS) and hexamethyldisiloxane (HMDSO) constituted the respective gas precursors for the deposition of a-C:H (DLC), a-C:H:Si and a-C:H:Si:O films by dual MW/pulsed-DC PACVD. This work presents systematic studies of the deposition rate, hardness, adhesion, abrasive wear and water contact angle aimed to optimize the technological parameters of deposition: gas pressure, relative gas flow of the monomers and input power. This study has been completed with measures of the atomic composition of the samples. Deposition rates around 1 mu m/h, typical for standard processes held in the large reactor, were increased about by a factor 10 when the ionization source has been operated in ECR mode. (C) 2008 Elsevier B.V. All rights reserved.