The dependences of the structural, electrical and optical properties of transparent conductive Ga-doped ZnO (GZO) films with a thickness of 100 nm on the unheated cyclo olefin polymer (COP) and alkali-free glass substrate temperatures has been studied. GZO Films were prepared on substrates by ion plating deposition with direct-current arc discharge. The substrate temperature rises with longer plasma exposure time. By controlling the time Of exposure to plasma such that the substrate temperature does not exceed 100 degrees C, highly transparent conductive GZO with the resistivity of less than 7 x 10(-4) Omega cm on COP and glass substrates call be obtained, (C) 2008 Elsevier B.V All rights reserved.