Thin Solid Films, Vol.517, No.2, 891-895, 2008
Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment
Aluminum-doped zinc oxide (AZO) films were fabricated at a low substrate temperature (300 degrees C) in air by KrF excimer laser irradiation of sol-gel spin-coated films. Structural, electrical and optical properties of the laser-irradiated films at different laser energies were studied and compared with those prepared by conventional high-temperature processing. The 200 nm laser-irradiated AZO film shows a resistivity of 44 x 10(-3) Omega-cm and about 90% optical transmittance in the visible range upon laser irradiation. The films were oriented preferentially along (002) direction. (C) 2008 Elsevier B.V. All rights reserved.
Keywords:Transparent conductive oxide;Sol-gel;Sol-gel deposition;Organic light-emitting device;Laser annealing;Optical properties;X-ray diffraction;Scanning electron microscopy