Thin Solid Films, Vol.516, No.22, 8022-8028, 2008
Structural characterization of self-assembled semiconductor islands by three-dimensional X-ray diffraction mapping in reciprocal space
For the first time self-organized epitaxially grown semiconductor islands were investigated by a full three-dimensional mapping of the scattered X-ray intensity in reciprocal space. Intensity distributions were measured in a coplanar diffraction geometry around symmetric and asymmetric Bragg reflections. The 3D intensity maps were compared with theoretical simulations based on continuum-elasticity simulations of internal strains in the islands and on kinematical scattering theory whereby local chemical composition and strain profiles of the islands were retrieved. (C) 2008 Published by Elsevier B.V.