The Polymer-assisted Deposition (PAD) method was used to create crack-free homogenous metal oxide films for use as targets in nuclear science applications. Metal oxide films of europium, thulium, and hafnium were prepared as models for actinide oxides. Films produced by a single application of PAD were homogenous and uniform and ranged in thickness from 30 to 320 nm. The reapplication of the PAD method (six times) with a 10% by weight hafhium(IV) solution resulted in an equally homogeneous and uniform film with a total thickness of 600 min. (c) 2007 Elsevier B.V. All rights reserved.