Thin Solid Films, Vol.516, No.16, 5404-5408, 2008
Microstructure and tribological behavior of WS2-Ag composite films deposited by RF magnetron sputtering
WS2-Ag composite films were deposited on medium carbon steel substrate by RF magnetron sputtering method. The morphology and microstructure of the composite films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The tribological behavior was investigated using a ball-on-disk tribometer in vacuum and in humid air. In the range of Ag content of the film from 4.2 at.% to 40.4 at.%, Ag phase dispersed in amorphous WS2 matrix, and it changed from amorphous to crystalline structure with the increase of Ag content. The friction coefficients of composite films in humid air were lower and more stable than those of pure WS2 film, and the environmental sensitivity of tribological behavior decreased obviously with the addition of Ag in the films. At the content of 16.2 at.% Ag, the composite film was dense and adherent, and exhibited excellent tribological performance both in vacuum and in humid air. (c) 2007 Published by Elsevier B.V.